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(Senior) Process Engineer Diffusion / RTP and Activation 80-100% (f/m/d)

Location: Lenzburg, Aargau, Switzerland
Job ID: CH54951080
Date Posted: Sep 28, 2023
Segment: Green Energy & Mobility
Business Unit: Hitachi Energy
Company Name: Hitachi Energy Ltd
Profession (Job Category): Engineering & Science
Job Type (Experience Level): Experienced
Job Schedule: Full time
Remote: No

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General information:

We are looking for a technical lead for process development of the new generation of SiC and Si devices with the focus on Rapid Thermal Processing (RTP), High Temperature Activation (up to 1'900oC) / Oxidation, LPCVD. You are capable to establish new processes, solve complex problems in the production environment and provide new ideas by questioning of the existing solutions. You are able to establish successful internal and external collaborations and work perseveringly to achieve common targets. In close collaboration with R&D device development and process integration, you develop and execute the technology roadmap and continuous improvement projects.


Work on the new generation of power devices on 150 mm SiC and 200 mm Si wafers Establishing and optimization of Rapid Thermal Processing, Batch LPCVD, Batch Spray Tools and High Temperature semiconductor processes within BiMOS production (Diffusion area tools and related metrology) to gain better devices, yield and productivity Taking the process ownership for RTP, c.ACTIVATORTM and other high temperature tools for SiC volume production Evaluation of new materials, methods and technologies for the involved production areas Close work together with Equipment and Maintenance Engineers to meet the production specifications and enhance process- and tool stability Responsibility for the development packages in cooperation with R&D and Product Engineering Definition, process qualification and tuning of the new and upgraded tools

Your background:

University degree in Physics, Chemistry, Engineering etc. or related experience in semiconductors More than 5 years of experience in semiconductor production environment in one or multiple areas: Rapid Thermal Processing, high temperature Diffusion, batch LPCVD Knowledge of the specific power semiconductor applications like Diodes, IGBTs and MOSFETs is a clear advantage Experience with production-oriented tools like Centrotherm (c.HORICOOTM, c.ACTIVATORTM), ASM, Koyo ovens, TEL FSI batch spray tools is of a big plus Experience in partial or full integration of various semiconductor processes Know-how in optimization of processes and tools to gain favorable device properties, yield and productivity Fluent English; German is an advantage but not a must

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